Inventor · disambiguated record
Seungkyu Lim
Also filed as: LIM SEUNGKYU
1 granted patent·7 pending applications·2 citations·filing 2015–2024
18Inventor score
Top patents by PatentIndex Score
8 records- 0170US9691618B2Methods of fabricating semiconductor devices including performing an atomic layer etching processSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 27, 2017·2 cites·13 claims
- 0263US2025285836A1Plasma deposition apparatus and plasma deposition methodSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0353US2024203710A1Cover wafer and method of cleaning substrate processing apparatus including the sameSAMSUNG ELECTONICS CO LTD·Filed 2023·Application pending·0 cites
- 0452US2025273504A1Wafer transfer apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0548US2023187189A1Plasma control apparatus and plasma processing systemSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0636US2018174802A1Dielectric window, plasma system therewith, method of fabricating dielectric window and method of manufacturing semiconductor device using the plasma systemSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites
- 0730US2016343547A1Substrate-processing system and method of coating carbon-protection layer thereforSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
- 0823US2016079040A1Plasma Processing Devices Having a Surface Protection LayerSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →