Inventor · disambiguated record
Seungchan Moon
Also filed as: MOON SEUNGCHAN
0 granted patents·3 pending applications·0 citations·filing 2023–2023
Files withIUCF HYU3
Top patents by PatentIndex Score
3 records- 0163US2025334514A1Euv mask inspection apparatus and method through illumination controlIUCF HYU·Filed 2023·Application pending·0 cites
- 0262US2025231494A1Comprehensive inspection equipment for euv exposure processIUCF HYU·Filed 2023·Application pending·0 cites
- 0360US2025321186A1Device and method for measuring refraction coefficient and extinction coefficient of euv mask materialIUCF HYU·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →