Inventor · disambiguated record
Seiya Shigematsu
Also filed as: SHIGEMATSU SEIYA
0 granted patents·3 pending applications·0 citations·filing 2023–2025
Technology areasH10P
Files withKOKUSAI ELECTRIC CORP3
Top patents by PatentIndex Score
3 records- 0153US2023257883A1Substrate processing apparatus, recording medium, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0247US2024242986A1Temperature control method, method of manufacturing semiconductor device, temperature control system, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0343US2025226246A1Temperature Control System, Method of Manufacturing Semiconductor Device, Processing Apparatus and Non-transitory Computer-readable Recording MediumKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →