Inventor · disambiguated record
Seung-Yoon Song
Also filed as: Song seung yoon
4 granted patents·4 citations·filing 2019–2021
61Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0185US10964578B2Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 30, 2021·4 cites·20 claims
- 0264US11521866B2Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 0363US11437264B2Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Sep 6, 2022·0 cites·10 claims
- 0457US11037806B2Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jun 15, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →