Inventor · disambiguated record
Shintaro Aichi
Also filed as: AICHI SHINTARO
6 granted patents·3 pending applications·44 citations·filing 2004–2025
77Inventor score
Top patents by PatentIndex Score
9 records- 0193US7283199B2Exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Oct 16, 2007·29 cites·5 claims
- 0275US7486378B2Exposure apparatusCANON KK·Filed 2006·Granted Feb 3, 2009·4 cites·14 claims
- 0369US7317505B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2004·Granted Jan 8, 2008·11 cites·6 claims
- 0462US2025369868A1Environmental conditioning device, processing system, article manufacturing method, and management methodCANON KK·Filed 2025·Application pending·0 cites
- 0558US2024201603A1Air cooling apparatus, environmental control apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2023·Application pending·0 cites
- 0657US2024316488A1Cleaning apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0748US8184261B2Exposure apparatusAICHI SHINTARO·Filed 2008·Granted May 22, 2012·0 cites·19 claims
- 0847US11194248B2Method of managing imprint apparatus, imprint apparatus, method of managing planarized layer forming apparatus, and method of manufacturing articleCANON KK·Filed 2019·Granted Dec 7, 2021·0 cites·10 claims
- 0937US8982315B2Exposure apparatus, temperature regulating system, and device manufacturing methodAICHI SHINTARO·Filed 2008·Granted Mar 17, 2015·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →