Inventor · disambiguated record
Shunpei Akita
Also filed as: AKITA SHUNPEI
0 granted patents·2 pending applications·0 citations·filing 2024–2025
Technology areasH10P
Files withJSR CORP2
Top patents by PatentIndex Score
2 records- 0153US2025251666A1Resist underlayer film-forming composition, and method for manufacturing semiconductor substrateJSR CORP·Filed 2025·Application pending·0 cites
- 0253US2025110407A1Semiconductor substrate manufacturing method, and resist base film forming compositionJSR CORP·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →