Inventor · disambiguated record

Shih-Ming Chang

Also filed as: CHANG SHIH-MING

171 granted patents·33 pending applications·1,213 citations·filing 1984–2025

99Inventor score

Technology areasH10P G03F H10W G06F H01J

Files withTAIWAN SEMICONDUCTOR MFG CO LTD138 TAIWAN SEMICONDUCTOR MFG41 CHANG SHIH-MING9 CIXI HAOSHENG ELECTRONICS & HARDWARE CO LTD2 AVERMEDIA TECH INC1

Top patents by PatentIndex Score

204 records

0199US9153478B2Spacer etching process for integrated circuit designTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Oct 6, 2015·118 cites·20 claims
0299US9053279B2Pattern modification with a preferred position functionTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 9, 2015·104 cites·20 claims
0398US9716032B2Via-free interconnect structure with self-aligned metal line interconnectionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 25, 2017·48 cites·15 claims
0498US9529268B2Systems and methods for improving pattern transferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 27, 2016·363 cites·20 claims
0598US9501601B2Layout optimization of a main pattern and a cut patternTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Nov 22, 2016·104 cites·20 claims
0698US8716841B1Photolithography mask and processTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted May 6, 2014·66 cites·20 claims
0797US12019974B2Geometric mask rule check with favorable and unfavorable zonesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 25, 2024·2 cites·20 claims
0897US11243472B2Optical proximity correction and photomasksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Feb 8, 2022·4 cites·20 claims
0997US10678142B2Optical proximity correction and photomasksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 9, 2020·13 cites·20 claims
1096US11714951B2Geometric mask rule check with favorable and unfavorable zonesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 1, 2023·4 cites·20 claims
1196US11687006B2Method of manufacturing photo masksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 27, 2023·2 cites·20 claims
1296US8835323B1Method for integrated circuit patterningTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 16, 2014·22 cites·20 claims
1395US11789370B2Optical proximity correction and photomasksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 17, 2023·2 cites·20 claims
1495US7383530B2System and method for examining mask pattern fidelityTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Jun 3, 2008·27 cites·12 claims
1594US11004855B2Buried metal track and methods forming sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 11, 2021·7 cites·20 claims
1694US10497565B2Method for forming semiconductor device structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 3, 2019·7 cites·20 claims
1794US8962464B1Self-alignment for using two or more layers and methods of forming sameTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Feb 24, 2015·16 cites·20 claims
1893US10446555B2Buried metal track and methods forming sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 15, 2019·7 cites·20 claims
1991US10734321B2Integrated circuit and method of manufacturing sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 4, 2020·6 cites·20 claims
2091US9672320B2Method for integrated circuit manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 6, 2017·10 cites·20 claims
2190US12298673B2Method of manufacturing photo masksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted May 13, 2025·0 cites·20 claims
2290US10459353B2Lithography system with an embedded cleaning moduleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 29, 2019·5 cites·20 claims
2390US9852908B2Methods for integrated circuit design and fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 26, 2017·4 cites·20 claims
2490US9465906B2System and method for integrated circuit manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 11, 2016·6 cites·17 claims
2590US8227150B2Holographic reticle and patterning methodCHANG SHIH-MING·Filed 2010·Granted Jul 24, 2012·6 cites·20 claims
2689US12406130B2Geometric mask rule check with favorable and unfavorable zonesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 2, 2025·0 cites·20 claims
2789US9293341B2Mechanisms for forming patterns using multiple lithography processesTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Mar 22, 2016·7 cites·20 claims
2889US8907497B2Semiconductor device with self-aligned interconnects and blocking portionsCHANG SHIH-MING·Filed 2012·Granted Dec 9, 2014·11 cites·18 claims
2989US8779592B2Via-free interconnect structure with self-aligned metal line interconnectionsTANG YU-PO·Filed 2012·Granted Jul 15, 2014·14 cites·19 claims
3089US7883601B2Apparatus and method for controlling relative particle speeds in a plasmaTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Feb 8, 2011·8 cites·20 claims
3189US2024379358A1Methods for integrated circuit design and fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
3288US9911623B2Via connection to a partially filled trenchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 6, 2018·4 cites·20 claims
3388US9875906B2Mechanisms for forming patterns using multiple lithography processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 23, 2018·4 cites·20 claims
3488US9245763B2Mechanisms for forming patterns using multiple lithography processesTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Jan 26, 2016·6 cites·20 claims
3587US10515823B2Via connection to a partially filled trenchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·3 cites·20 claims
3687US10163652B2Mechanisms for forming patterns using multiple lithography processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 25, 2018·6 cites·19 claims
3787US9897929B2Homogeneous thermal equalization with active deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Feb 20, 2018·2 cites·20 claims
3887US9541846B2Homogeneous thermal equalization with active deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 10, 2017·3 cites·24 claims
3987US9081289B2System and method for optimization of an imaged pattern of a semiconductor deviceTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jul 14, 2015·5 cites·20 claims
4087US2025298957A1Geometric mask rule check with favorable and unfavorable zonesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
4187US2024280910A1Method of operating semiconductor apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
4286US10495982B2System and method for real-time overlay error reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 3, 2019·4 cites·21 claims
4386US9684236B1Method of patterning a film layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jun 20, 2017·4 cites·20 claims
4486US8828885B2Photo resist trimmed line end spaceTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 9, 2014·5 cites·20 claims
4586US7897008B2Apparatus and method for regional plasma controlTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Mar 1, 2011·6 cites·18 claims
4685US12038693B2Method of manufacturing photo masksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 16, 2024·0 cites·20 claims
4785US9786602B2Interconnection structure and methods of fabrication the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 10, 2017·3 cites·20 claims
4885US9362132B2Systems and methods for a sequential spacer schemeTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Jun 7, 2016·4 cites·20 claims
4985US2024213034A1Via connection to a partially filled trenchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
5085US2025314972A1System and method for selecting photolithography processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites

Showing the top 50 of 204 patent records by PatentIndex Score.

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →