Inventor · disambiguated record
Shang-Wern Chang
Also filed as: CHANG SHANG-WERN
12 granted patents·2 pending applications·61 citations·filing 2000–2023
88Inventor score
Top patents by PatentIndex Score
14 records- 0192US11703766B2Materials and methods for forming resist bottom layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 18, 2023·1 cites·20 claims
- 0291US11442364B2Materials and methods for forming resist bottom layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 13, 2022·3 cites·20 claims
- 0386US6265131B1Alicyclic dissolution inhibitors and positive potoresist composition containing the sameEVERLIGHT USA INC·Filed 2000·Granted Jul 24, 2001·19 cites·14 claims
- 0479US2023359124A1Materials and methods for forming resist bottom layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0574US6441115B1Photosensitive polymerEVERLIGHT USA INC·Filed 2000·Granted Aug 27, 2002·13 cites·22 claims
- 0671US11320738B2Pattern formation method and material for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 3, 2022·1 cites·20 claims
- 0768US6316159B1Chemical amplified photoresist compositionEVERLIGHT USA INC·Filed 2000·Granted Nov 13, 2001·10 cites·28 claims
- 0865US6271412B1Photosensitive monomerEVERLIGHT USA INC·Filed 2000·Granted Aug 7, 2001·8 cites·9 claims
- 0965US2022260918A1Pattern formation method and material for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 1063US6294309B1Positive photoresist composition containing alicyclic dissolution inhibitorsEVERLIGHT USA INC·Filed 2000·Granted Sep 25, 2001·3 cites·15 claims
- 1155US9281205B2Method for etching an ultra thin filmTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Mar 8, 2016·0 cites·17 claims
- 1255US6376700B1Alicyclic compoundEVERLIGHT USA INC·Filed 2000·Granted Apr 23, 2002·3 cites·4 claims
- 1352US9563946B2Overlay metrology method and overlay control method and systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 7, 2017·0 cites·20 claims
- 1446US9814097B2Baking apparatus for priming substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 7, 2017·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →