Inventor · disambiguated record

Shih-Tsuan Chang

Also filed as: CHANG SHIH-TSUAN

2 granted patents·18 citations·filing 2009–2011

59Inventor score

Technology areasH01J

Files withYEH CHANG CHUN2

Top patents by PatentIndex Score

2 records

0185US8063363B2Method and apparatus for charged particle beam inspectionYEH CHANG CHUN·Filed 2009·Granted Nov 22, 2011·13 cites·36 claims
0277US8497475B2Method and apparatus for charged particle beam inspectionYEH CHANG CHUN·Filed 2011·Granted Jul 30, 2013·5 cites·36 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →