Inventor · disambiguated record
Shuichiro Fukutome
Also filed as: FUKUTOME SHUICHIRO
4 granted patents·34 citations·filing 2001–2015
74Inventor score
Top patents by PatentIndex Score
4 records- 0185US8277603B2Move mechanism for moving target object and charged particle beam writing apparatusTAMAMUSHI SHUICHI·Filed 2007·Granted Oct 2, 2012·11 cites·11 claims
- 0282US7589335B2Charged-particle beam pattern writing method and apparatus and software program for use thereinNUFLARE TECHNOLOGY INC·Filed 2007·Granted Sep 15, 2009·12 cites·14 claims
- 0362US9431208B2Charged-particle beam drawing apparatus and vibration damping mechanismNUFLARE TECHNOLOGY INC·Filed 2015·Granted Aug 30, 2016·1 cites·20 claims
- 0459US6676289B2Temperature measuring method in pattern drawing apparatusTOSHIBA KK·Filed 2001·Granted Jan 13, 2004·10 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →