Inventor · disambiguated record
Sheby Mary George
Also filed as: GEORGE SHEBY MARY
1 granted patent·1 pending application·0 citations·filing 2013–2023
11Inventor score
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2 records- 0160US2023264963A1Method for fabricating trihalodisilane and method for fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0257US9790238B2Strontium precursor, method for preparing same, and method for forming thin film by using sameKOREA RES INST CHEMICAL TECH·Filed 2013·Granted Oct 17, 2017·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →