Inventor · disambiguated record
Shigehiro Goto
Also filed as: GOTO SHIGEHIRO
12 granted patents·4 pending applications·1,639 citations·filing 1999–2024
92Inventor score
Technology areasH10P
Top patents by PatentIndex Score
16 records- 0198US8003919B2Substrate heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Granted Aug 23, 2011·481 cites·11 claims
- 0297US7432476B2Substrate heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Granted Oct 7, 2008·502 cites·20 claims
- 0395US8608885B2Substrate heat treatment apparatusGOTO SHIGEHIRO·Filed 2006·Granted Dec 17, 2013·556 cites·26 claims
- 0488US7718925B2Substrate heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Granted May 18, 2010·16 cites·20 claims
- 0583US6827782B2Chemical treating apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Dec 7, 2004·30 cites·20 claims
- 0672US9508573B2Substrate processing apparatus and substrate processing methodKASHIYAMA MASAHITO·Filed 2012·Granted Nov 29, 2016·3 cites·10 claims
- 0769US10651056B2Treating liquid vaporizing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted May 12, 2020·1 cites·19 claims
- 0869US7267723B2Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzleDAINIPPON SCREEN MFG·Filed 2004·Granted Sep 11, 2007·10 cites·43 claims
- 0968US6440218B1Coating solution applying method and apparatusDAINIPPON SCREEN MFG·Filed 1999·Granted Aug 27, 2002·38 cites·4 claims
- 1067US7628862B2Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzleDAINIPPON SCREEN MFG·Filed 2006·Granted Dec 8, 2009·2 cites·12 claims
- 1160US2024312849A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2024·Application pending·0 cites
- 1260US2024299971A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2024·Application pending·0 cites
- 1342US2006292515A1Heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
- 1439US2004232136A1Heat-treating apparatusDAINIPPON SCREEN MFG·Filed 2004·Application pending·0 cites
- 1538US10214814B2Substrate treating apparatus and treatment gas supplying nozzleSCREEN HOLDINGS CO LTD·Filed 2016·Granted Feb 26, 2019·0 cites·19 claims
- 1634US10629463B2Thermal processing apparatus and thermal processing methodSCREEN HOLDINGS CO LTD·Filed 2015·Granted Apr 21, 2020·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →