Inventor · disambiguated record
Shiro Hara
Also filed as: HARA SHIRO
27 granted patents·6 pending applications·297 citations·filing 2000–2022
93Inventor score
Files withAIST14NAT INST ADVANCED IND SCIENCE & TECH6FUJIKOSHI MACHINERY CORP3HARA SHIRO3NAT INST OF ADVANCED IND SCIEN2
Top patents by PatentIndex Score
33 records- 0197US9281223B2Coupling systemHARA SHIRO·Filed 2011·Granted Mar 8, 2016·280 cites·7 claims
- 0284US9016501B2Coupling transfer systemHARA SHIRO·Filed 2011·Granted Apr 28, 2015·6 cites·9 claims
- 0371US9017146B2Wafer polishing apparatusFUJIKOSHI MACHINERY CORP·Filed 2013·Granted Apr 28, 2015·2 cites·29 claims
- 0468US9209054B2Device manufacturing apparatusHARA SHIRO·Filed 2011·Granted Dec 8, 2015·2 cites·7 claims
- 0566US9777375B2Converging mirror furnaceNAT INST ADVANCED IND SCIENCE & TECH·Filed 2012·Granted Oct 3, 2017·2 cites·25 claims
- 0665US11686479B2Encapsulated cleanroom systemAIST·Filed 2021·Granted Jun 27, 2023·0 cites·7 claims
- 0763US9524895B2Substrate transfer antechamber mechanismNAT INST ADVANCED IND SCIENCE & TECH·Filed 2013·Granted Dec 20, 2016·1 cites·7 claims
- 0852US10632590B2Work processing apparatus and liquid chemical bag for the sameFUJIKOSHI MACHINERY CORP·Filed 2016·Granted Apr 28, 2020·0 cites·15 claims
- 0952US6702176B2Solder, method for processing surface of printed wiring board, and method for mounting electronic partNEC TOPPAN CIRCUIT SOLUTIONS·Filed 2001·Granted Mar 9, 2004·4 cites·2 claims
- 1051US2025140580A1Wet processing apparatusAIST·Filed 2022·Application pending·0 cites
- 1148US10431446B2Wet processing apparatusAIST·Filed 2014·Granted Oct 1, 2019·0 cites·13 claims
- 1248US10186489B2Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation markAIST·Filed 2014·Granted Jan 22, 2019·0 cites·10 claims
- 1348US2022341053A1Plating machine with treatment units arranged on circumferenceAIST·Filed 2022·Application pending·0 cites
- 1445US10137570B2Link-type transfer robotAIST·Filed 2013·Granted Nov 27, 2018·0 cites·15 claims
- 1544US9563136B2Yellow room systemNAT INST ADVANCED IND SCIENCE & TECH·Filed 2012·Granted Feb 7, 2017·0 cites·18 claims
- 1643US10115619B2Coupling transfer systemNATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECH AIST·Filed 2015·Granted Oct 30, 2018·0 cites·5 claims
- 1742US2015050602A1Spin Development Method and ApparatusNAT INST OF ADVANCED IND SCIEN·Filed 2012·Application pending·0 cites
- 1841US9513567B2Exposure apparatus and exposure methodNAT INST ADVANCED IND SCIENCE & TECH·Filed 2012·Granted Dec 6, 2016·0 cites·11 claims
- 1940US11056410B2Method of manufacturing semiconductor package using alignment mark on waferAIST·Filed 2018·Granted Jul 6, 2021·0 cites·15 claims
- 2040US11011403B2Transport container automatic clamping mechanismAIST·Filed 2018·Granted May 18, 2021·0 cites·11 claims
- 2140US9254540B2Mounting structure of movable manufacturing device, fixing structure and movable manufacturing deviceNAT INST OF ADVANCED IND SCIEN·Filed 2014·Granted Feb 9, 2016·0 cites·17 claims
- 2239US9478452B2Small production device and production system using the sameNAT INST ADVANCED IND SCIENCE & TECH·Filed 2014·Granted Oct 25, 2016·0 cites·3 claims
- 2339US9123795B2Method of manufacturing semiconductor wafersFUJIKOSHI MACHINERY CORP·Filed 2013·Granted Sep 1, 2015·0 cites·12 claims
- 2437US10163674B2Circular support substrate for semiconductorAIST·Filed 2015·Granted Dec 25, 2018·0 cites·18 claims
- 2537US10163819B2Surface mount package and manufacturing method thereofAIST·Filed 2015·Granted Dec 25, 2018·0 cites·14 claims
- 2637US2002159913A1Sn-Ag-Cu solder and surface treatment and parts mounting methods using the sameFiled 2002·Application pending·0 cites
- 2736US10332768B2Compact manufacturing device, and inter-device transport system for production lineAIST·Filed 2015·Granted Jun 25, 2019·0 cites·16 claims
- 2835US10240350B2Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structureSANYO CO LTD·Filed 2014·Granted Mar 26, 2019·0 cites·8 claims
- 2935US2001041530A1Local clean method and local clean processing and treating apparatusAGENCY IND SCIENCE TECHN·Filed 2000·Application pending·0 cites
- 3032US10286426B2Columnar laminar flow generation device and method for generating columnar laminar flowsAIST·Filed 2016·Granted May 14, 2019·0 cites·20 claims
- 3131US10304675B2System for integrating preceding steps and subsequent stepsAIST·Filed 2015·Granted May 28, 2019·0 cites·4 claims
- 3229US10478867B2Treatment liquid supply device using syringe, and wet treatment deviceAIST·Filed 2015·Granted Nov 19, 2019·0 cites·7 claims
- 3328US2017098557A1Plasma processing deviceNAT INST ADVANCED IND SCIENCE & TECH·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →