Inventor · disambiguated record
Shoji Kano
Also filed as: KANO SHOJI
13 granted patents·10 pending applications·219 citations·filing 1976–2021
91Inventor score
Top patents by PatentIndex Score
23 records- 0183US5665260ACeramic electrostatic chuck with built-in heaterSHINETSU CHEMICAL CO·Filed 1994·Granted Sep 9, 1997·89 cites·6 claims
- 0282US6242719B1Multiple-layered ceramic heaterSHINETSU HANDOTAI KK·Filed 1999·Granted Jun 5, 2001·69 cites·9 claims
- 0380US8829397B2Corrosion-resistant multilayer ceramic memberKANO SHOJI·Filed 2008·Granted Sep 9, 2014·11 cites·4 claims
- 0472US6384383B2Ceramic heating jigSHINETSU CHEMICAL CO·Filed 2000·Granted May 7, 2002·15 cites·26 claims
- 0570US9351344B2Ceramic heaterSHINETSU CHEMICAL CO·Filed 2014·Granted May 24, 2016·2 cites·19 claims
- 0667US11555255B2Tantalum carbide coated carbon material, manufacturing method thereof, and member for apparatus for manufacturing semiconductor single crystalSHINETSU CHEMICAL CO·Filed 2021·Granted Jan 17, 2023·0 cites·5 claims
- 0767US7952054B2Heating elementSHINETSU CHEMICAL CO·Filed 2007·Granted May 31, 2011·2 cites·44 claims
- 0861US5759646AVessel of pyrolytic boron nitrideSHINETSU CHEMICAL CO·Filed 1996·Granted Jun 2, 1998·15 cites·5 claims
- 0959US8440566B2Method for forming an aluminum nitride thin filmKATO KOJI·Filed 2011·Granted May 14, 2013·0 cites·9 claims
- 1059US6917021B2Heating apparatus with electrostatic attraction functionSHINETSU CHEMICAL CO·Filed 2003·Granted Jul 12, 2005·8 cites·9 claims
- 1156US2019169768A1Tantalum carbide coated carbon material, manufacturing method thereof, and member for apparatus for manufacturing semiconductor single crystalSHINETSU CHEMICAL CO·Filed 2018·Application pending·0 cites
- 1254US6953918B2Heating apparatus which has electrostatic adsorption function, and method for producing itSHINETSU CHEMICAL CO·Filed 2003·Granted Oct 11, 2005·4 cites·10 claims
- 1352US2013302616A1Method for coating a graphite material with pyrolytic boron nitride and a coated article obtained by that methodSHINETSU CHEMICAL CO·Filed 2013·Application pending·0 cites
- 1448US2010003510A1Corrosion-resistant multilayer ceramic memberSHINETSU CHEMICAL CO·Filed 2009·Application pending·0 cites
- 1547US8115141B2Heating elementKIMURA NOBORU·Filed 2007·Granted Feb 14, 2012·0 cites·60 claims
- 1645US2012107613A1Corrosion-resistant article coated with aluminum nitrideKANO SHOJI·Filed 2011·Application pending·0 cites
- 1744US2009308859A1Ceramic heater and method of manufacturing the sameSHINETSU CHEMICAL CO·Filed 2009·Application pending·0 cites
- 1843US2007274021A1Electrostatic chuck apparatusSHINETSU CHEMICAL CO·Filed 2007·Application pending·0 cites
- 1941US2009242544A1Wafer heating apparatus having electrostatic attraction functionSHINETSU CHEMICAL CO·Filed 2006·Application pending·0 cites
- 2039US2004223285A1Wafer heating apparatus having electrostatic adsorption functionSHINETSU CHEMICAL CO·Filed 2004·Application pending·0 cites
- 2139US2018124873A1Heating elementSHINETSU CHEMICAL CO·Filed 2017·Application pending·0 cites
- 2239US2011256412A1Aluminum nitride film and a substance coated with sameSHINETSU CHEMICAL CO·Filed 2011·Application pending·0 cites
- 2335US4124729AMethod of multiple powder coating employing geneva gearsKISHIMOTO SANGYO CO·Filed 1976·Granted Nov 7, 1978·4 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →