Inventor · disambiguated record

Shi-Yu Ke

Also filed as: KE SHI YU

1 granted patent·1 pending application·0 citations·filing 2021–2025

14Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD2

Top patents by PatentIndex Score

2 records

0162US2025201528A1Method and apparatus for revitalizing plasma processing toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
0261US12261026B2Method and apparatus for revitalizing plasma processing toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 25, 2025·0 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →