Inventor · disambiguated record
Sheung Kim
Also filed as: KIM SHEUNG K · KIM SHEUNG KI
0 granted patents·3 pending applications·0 citations·filing 2003–2004
Top patents by PatentIndex Score
3 records- 0131US2007201016A1Method And Apparatus For Seasoning Semiconductor Apparatus Of Sensing Plasma EquipmentADAPTIVE PLASMA TECH CORP·Filed 2004·Application pending·0 cites
- 0231US2007151947A1Method for setting plasma chamber having an adaptive plasma source, plasma etching method using the same and manufacturing method for adaptive plasma sourceSONG YEONG S·Filed 2004·Application pending·0 cites
- 0331US2003180971A1Plasma etching method and apparatus for manufacturing a semiconductor deviceADAPTIVE PLASMA TECH CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →