Inventor · disambiguated record
Shinan Ku
Also filed as: KU SHINAN
5 granted patents·2 pending applications·4 citations·filing 2020–2025
70Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD7
Top patents by PatentIndex Score
7 records- 0194US12013646B2High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 18, 2024·2 cites·20 claims
- 0292US11614691B2High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 28, 2023·2 cites·20 claims
- 0386US12393124B2High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 19, 2025·0 cites·20 claims
- 0486US2025328086A1High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0580US12140857B2Method of fast surface particle and scratch detection for EUV mask backsideTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 12, 2024·0 cites·20 claims
- 0678US2024393673A1Method of fast surface particle and scratch detection for euv mask backsideTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0768US11768431B2Method of fast surface particle and scratch detection for EUV mask backsideTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 26, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →