Inventor · disambiguated record
Shigeo Kumabe
Also filed as: KUMABE SHIGEO
3 granted patents·147 citations·filing 1995–1997
75Inventor score
Top patents by PatentIndex Score
3 records- 0184US5618227AApparatus for polishing waferMITSUBUSHI MATERIALS CORP·Filed 1995·Granted Apr 8, 1997·90 cites·4 claims
- 0273US5989105AMethod and apparatus for polishing chamfers of semiconductor wafersMITSUBISHI MATERIALS CORP·Filed 1997·Granted Nov 23, 1999·49 cites·19 claims
- 0338US5976954AMethod and apparatus for cleaning and separating wafers bonded to a fixing memberMITSUBISHI MATERIALS CORP·Filed 1997·Granted Nov 2, 1999·8 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →