Inventor · disambiguated record
Shang-Sheng Li
Also filed as: Li shang-sheng
9 granted patents·3 pending applications·177 citations·filing 2011–2024
83Inventor score
Technology areasH10P
Top patents by PatentIndex Score
12 records- 0195US9536759B2Baking apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 3, 2017·168 cites·20 claims
- 0285US9855579B2Spin dispenser module substrate surface protection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 2, 2018·7 cites·20 claims
- 0378US12130553B2Resist pump buffer tank and method of resist defect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 29, 2024·0 cites·20 claims
- 0478US2024395582A1Liquid storage for facility chemical supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0574US2024389213A1Electrostatic discharge prevention pumpTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0672US11806743B2Spin dispenser module substrate surface protection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
- 0769US11769678B2Liquid storage for facility chemical supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 26, 2023·0 cites·16 claims
- 0868US2022334486A1Resist pump buffer tank and method of resist defect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0965US9793143B2Semiconductor processing apparatus and method of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 17, 2017·2 cites·19 claims
- 1061US11835861B2Resist pump buffer tank and method of resist defect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 5, 2023·0 cites·19 claims
- 1155US11344910B2Spin dispenser module substrate surface protection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 31, 2022·0 cites·20 claims
- 1234US8873020B2Cleaning nozzle for advanced lithography processYANG CHING-HAI·Filed 2011·Granted Oct 28, 2014·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →