Inventor · disambiguated record
Shigeru Matsui
Also filed as: MATSUI SHIGERU
89 granted patents·10 pending applications·1,165 citations·filing 1975–2021
99Inventor score
Files withHITACHI HIGH TECH CORP38HITACHI LTD27MATSUI SHIGERU11MITSUBISHI ELECTRIC CORP5NIPPON MUSICAL INSTRUMENTS MFG2
Top patents by PatentIndex Score
99 records- 0199US7761246B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2009·Granted Jul 20, 2010·97 cites·3 claims
- 0296US7710557B2Surface defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted May 4, 2010·24 cites·7 claims
- 0395US8035808B2Surface defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2010·Granted Oct 11, 2011·14 cites·17 claims
- 0495US4079651ATouch response sensor for an electronic musical instrumentNIPPON MUSICAL INSTRUMENTS MFG·Filed 1977·Granted Mar 21, 1978·46 cites·7 claims
- 0593US6384909B2Defect inspection method and apparatus for silicon waferHITACHI LTD·Filed 2001·Granted May 7, 2002·47 cites·8 claims
- 0691US7773210B2Appearance inspection apparatusHITACHI HIGH TECH CORP·Filed 2009·Granted Aug 10, 2010·10 cites·11 claims
- 0790US7557911B2Appearance inspection apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 7, 2009·10 cites·5 claims
- 0890US4727325ANMR imaging methodHITACHI LTD·Filed 1986·Granted Feb 23, 1988·59 cites·16 claims
- 0989US7719669B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted May 18, 2010·13 cites·20 claims
- 1089US7487049B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 3, 2009·12 cites·20 claims
- 1189US6157444ADefect inspection apparatus for silicon waferHITACHI LTD·Filed 1998·Granted Dec 5, 2000·89 cites·3 claims
- 1288US7457455B2Pattern defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2004·Granted Nov 25, 2008·22 cites·5 claims
- 1388US6792359B2Method for inspecting defect and system thereforHITACHI LTD·Filed 2001·Granted Sep 14, 2004·29 cites·16 claims
- 1487US7764367B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 27, 2010·10 cites·18 claims
- 1587US7602482B2Optical inspection method and optical inspection apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 13, 2009·10 cites·25 claims
- 1687US5179733AWristwatch band with radio antennaSEIKO EPSON CORP·Filed 1992·Granted Jan 12, 1993·82 cites·20 claims
- 1786US9157866B2Light source device, surface inspecting apparatus using the device, and method for calibrating surface inspecting apparatus using the deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 13, 2015·5 cites·14 claims
- 1886US8169606B2Appearance inspection apparatusOKA KENJI·Filed 2010·Granted May 1, 2012·4 cites·27 claims
- 1986US7535562B2Apparatus and method for defect inspectionHITACHI HIGH TECH CORP·Filed 2006·Granted May 19, 2009·10 cites·14 claims
- 2084US8248594B2Surface inspection method and surface inspection apparatusMATSUI SHIGERU·Filed 2010·Granted Aug 21, 2012·4 cites·20 claims
- 2183US7872742B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2010·Granted Jan 18, 2011·3 cites·10 claims
- 2282US8699017B2Appearance inspection apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Apr 15, 2014·2 cites·7 claims
- 2382US7671980B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Mar 2, 2010·5 cites·25 claims
- 2481USRE44977EMethod for detecting particles and defects and inspection equipment thereofHITACHI HIGH TECH CORP·Filed 2013·Granted Jul 1, 2014·2 cites·30 claims
- 2580US8462327B2Appearance inspection apparatusOKA KENJI·Filed 2012·Granted Jun 11, 2013·2 cites·8 claims
- 2680US7973922B2Optical inspection method and optical inspection apparatusHITACHI HIGH TECNOLOGIES CORP·Filed 2009·Granted Jul 5, 2011·6 cites·4 claims
- 2780US7952701B2Surface inspection method and inspecting device using the sameHITACHI HIGH TECH CORP·Filed 2009·Granted May 31, 2011·6 cites·27 claims
- 2880US6256092B1Defect inspection apparatus for silicon waferHITACHI LTD·Filed 1998·Granted Jul 3, 2001·41 cites·8 claims
- 2979US8160352B2Surface inspection method and surface inspection apparatusMATSUI SHIGERU·Filed 2010·Granted Apr 17, 2012·2 cites·14 claims
- 3079US7456948B2Method for detecting particles and defects and inspection equipment thereofHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 25, 2008·4 cites·22 claims
- 3179US6683683B2Defect inspection method and apparatus for silicon waferHITACHI LTD·Filed 2002·Granted Jan 27, 2004·13 cites·8 claims
- 3279US4757168ADecorative improved switching apparatus having a rocking elementJIMBO ELECTRIC·Filed 1986·Granted Jul 12, 1988·24 cites·10 claims
- 3377US8305568B2Surface inspection method and surface inspection apparatusMATSUI SHIGERU·Filed 2011·Granted Nov 6, 2012·3 cites·18 claims
- 3476US6118742ADisk-rotation control apparatusMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Sep 12, 2000·25 cites·6 claims
- 3575US9709714B2Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing sameHITACHI HIGH TECH CORP·Filed 2013·Granted Jul 18, 2017·2 cites·5 claims
- 3675US8246803B2Capillary electrophoresis apparatus and electrophoresis methodYAMAZAKI MOTOHIRO·Filed 2007·Granted Aug 21, 2012·5 cites·27 claims
- 3774US7990530B2Optical inspection method and optical inspection apparatusHITACHI HIGH TECH CORP·Filed 2010·Granted Aug 2, 2011·1 cites·12 claims
- 3874US7853068B2Pattern defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 14, 2010·2 cites·3 claims
- 3974US7619729B2Method for detecting particles and defects and inspection equipment thereofHITACHI HIGH TECH CORP·Filed 2008·Granted Nov 17, 2009·2 cites·8 claims
- 4074US6331967B1Disk-rotation control apparatusMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Dec 18, 2001·9 cites·10 claims
- 4172US7916287B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2010·Granted Mar 29, 2011·2 cites·10 claims
- 4271US4777443AInspection apparatus based on nuclear magnetic resonanceHITACHI LTD·Filed 1987·Granted Oct 11, 1988·26 cites·6 claims
- 4370US8493557B2Surface inspecting apparatus and surface inspecting methodMATSUI SHIGERU·Filed 2010·Granted Jul 23, 2013·1 cites·10 claims
- 4469US7616805B2Pattern defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Nov 10, 2009·3 cites·4 claims
- 4569US7133127B2Lighting optical machine and defect inspection systemHITACHI HIGH TECH CORP·Filed 2003·Granted Nov 7, 2006·7 cites·2 claims
- 4669US6226079B1Defect assessing apparatus and method, and semiconductor manufacturing methodHITACHI LTD·Filed 1998·Granted May 1, 2001·35 cites·9 claims
- 4768US9945993B2Curved grating, method for manufacturing the same, and optical deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Apr 17, 2018·2 cites·7 claims
- 4868US7755751B2Optical inspection method and optical inspection apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 13, 2010·1 cites·34 claims
- 4968US6160615ASurface measurement apparatus for detecting crystal defects of waferHITACHI LTD·Filed 1999·Granted Dec 12, 2000·35 cites·9 claims
- 5067US6191849B1Wafer inspecting apparatusHITACHI LTD·Filed 1998·Granted Feb 20, 2001·31 cites·24 claims
Showing the top 50 of 99 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →