Inventor · disambiguated record
Shougo Matsui
Also filed as: MATSUI SHOUGO
5 granted patents·175 citations·filing 1982–1988
84Inventor score
Files withFUJITSU LTD5
Top patents by PatentIndex Score
5 records- 0189US4809341ATest method and apparatus for a reticle or mask pattern used in semiconductor device fabricationFUJITSU LTD·Filed 1987·Granted Feb 28, 1989·81 cites·11 claims
- 0279US4790023AMethod for measuring dimensions of fine patternFUJITSU LTD·Filed 1987·Granted Dec 6, 1988·34 cites·4 claims
- 0378US5012523ADimension checking methodFUJITSU LTD·Filed 1988·Granted Apr 30, 1991·34 cites·6 claims
- 0446US4527070AMethod and apparatus for inspecting a patternFUJITSU LTD·Filed 1982·Granted Jul 2, 1985·12 cites·12 claims
- 0544US4603974AReticle used in semiconductor device fabrication and a method for inspecting a reticle pattern thereonFUJITSU LTD·Filed 1985·Granted Aug 5, 1986·14 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →