Inventor · disambiguated record
Shinji Nakaguma
Also filed as: NAKAGUMA SHINJI
4 granted patents·134 citations·filing 1990–2016
78Inventor score
Top patents by PatentIndex Score
4 records- 0187US6054016AMagnetically enhanced microwave plasma generating apparatusMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 25, 2000·61 cites·9 claims
- 0284US6109208APlasma generating apparatus with multiple microwave introducing meansMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Aug 29, 2000·50 cites·8 claims
- 0357US5210055AMethod for the plasma treatment of semiconductor devicesMITSUBISHI ELECTRIC CORP·Filed 1990·Granted May 11, 1993·22 cites·1 claims
- 0456US10049910B2Manufacturing method of semiconductor device and semiconductor manufacturing apparatus using a conveying robot conveying a semiconductor substrateRENESAS ELECTRONICS CORP·Filed 2016·Granted Aug 14, 2018·1 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →