Inventor · disambiguated record
Shigeki Ogawa
Also filed as: OGAWA SHIGEKI
10 granted patents·9 pending applications·363 citations·filing 1987–2025
90Inventor score
Top patents by PatentIndex Score
19 records- 0197US4814829AProjection exposure apparatusCANON KK·Filed 1987·Granted Mar 21, 1989·162 cites·43 claims
- 0284US4803389AStepping motor, method of driving the same and drive circuit thereforNIPPON TELEGRAPH & TELEPHONE·Filed 1987·Granted Feb 7, 1989·69 cites·6 claims
- 0383US5751404AExposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference platesCANON KK·Filed 1996·Granted May 12, 1998·54 cites·29 claims
- 0474US8922774B2Method of manufacturing device, and substrateCANON KK·Filed 2012·Granted Dec 30, 2014·2 cites·10 claims
- 0572US6248267B1Method for manufacturing fibril system fiberMITSUBISHI RAYON CO·Filed 1998·Granted Jun 19, 2001·26 cites·9 claims
- 0671US5228420AValve rocker coverTSUCHIYA SEISAKUSHO·Filed 1992·Granted Jul 20, 1993·26 cites·6 claims
- 0764US8927949B2Measuring apparatus, drawing apparatus, and article manufacturing methodOGAWA SHIGEKI·Filed 2012·Granted Jan 6, 2015·2 cites·10 claims
- 0863US2025296400A1Air conditioning control apparatus for vehicleSUBARU CORP·Filed 2024·Application pending·0 cites
- 0962US2025319851A1Surroundings monitoring apparatusSUBARU CORP·Filed 2025·Application pending·0 cites
- 1053US12509100B2Vehicle traveling performance control function simulation apparatusSUBARU CORP·Filed 2023·Granted Dec 30, 2025·0 cites·9 claims
- 1148US5660708AProcess for manufacturing a lead frameSUMITOMO METAL MINING CO·Filed 1995·Granted Aug 26, 1997·16 cites·13 claims
- 1243US2013148091A1Lithography apparatus and method, and method of manufacturing articleCANON KK·Filed 2012·Application pending·0 cites
- 1343US2013188165A1Lithography apparatus, and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 1435US2015362842A1Lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Application pending·0 cites
- 1534US2015325404A1Lithography apparatus and method, and method of manufacturing an articleCANON KK·Filed 2015·Application pending·0 cites
- 1634US2015364291A1Lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Application pending·0 cites
- 1733US2016011519A1Lithography apparatus and article manufacturing methodCANON KK·Filed 2015·Application pending·0 cites
- 1832US5843290AElectrolytic polishing apparatusSUMITOMO METAL MINING CO LIMIT·Filed 1997·Granted Dec 1, 1998·6 cites·2 claims
- 1924US2015380214A1Lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →