Inventor · disambiguated record

Shigeo Ohba

Also filed as: OHBA SHIGEO

1 granted patent·32 citations·filing 1996–1996

44Inventor score

Technology areasH10P

Files withKOKUSAI ELECTRIC CO LTD1

Top patents by PatentIndex Score

1 record

0160US6318944B1Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassetteKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Nov 20, 2001·32 cites·10 claims

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