Inventor · disambiguated record
Shouichi Sakamoto
Also filed as: SAKAMOTO SHOUICHI
5 granted patents·50 citations·filing 1999–2003
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0171US6391791B1Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereofULVAC COATING CORP·Filed 1999·Granted May 21, 2002·33 cites·6 claims
- 0268US6881991B2Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Apr 19, 2005·11 cites·2 claims
- 0341US7063922B2Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofMITSUBISHI ELECTRIC CORP·Filed 2003·Granted Jun 20, 2006·0 cites·4 claims
- 0441US7001698B2Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofMITSUBISHI ELECTRIC CORP·Filed 2003·Granted Feb 21, 2006·0 cites·4 claims
- 0538US6685848B1Method and apparatus for dry-etching half-tone phase-shift films half-tone phase-shift photomasks and method for the preparation thereof and semiconductor circuits and method for the fabrication thereofULVAC COATING CORP·Filed 1999·Granted Feb 3, 2004·6 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Shouichi Sakamoto files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →