Inventor · disambiguated record
Shi-Han Shann
Also filed as: SHANN SHI-HAN
3 granted patents·1 pending application·5 citations·filing 2020–2025
61Inventor score
Technology areasH05G
Files withTAIWAN SEMICONDUCTOR MFG CO LTD4
Top patents by PatentIndex Score
4 records- 0194US11860544B2Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 2, 2024·2 cites·20 claims
- 0294US11340531B2Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 24, 2022·3 cites·20 claims
- 0381US12332571B2Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 17, 2025·0 cites·20 claims
- 0481US2025271769A1Target control in extreme ultraviolet lithography systems using aberration of reflection imageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →