Inventor · disambiguated record
Shih-Chang Shih
Also filed as: SHIH SHIH-CHANG
15 granted patents·3 pending applications·72 citations·filing 1999–2024
89Inventor score
Top patents by PatentIndex Score
18 records- 0197US11086209B2EUV lithography mask with a porous reflective multilayer structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Aug 10, 2021·7 cites·20 claims
- 0296US11809075B2EUV lithography mask with a porous reflective multilayer structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 7, 2023·2 cites·20 claims
- 0388US10162277B2Extreme ultraviolet lithography system with debris trapper on exhaust lineTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 25, 2018·5 cites·20 claims
- 0488US2024377720A1EUV Lithography Mask With A Porous Reflective Multilayer StructureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0587US10534279B1Methods and apparatus for removing contamination from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 14, 2020·2 cites·20 claims
- 0686US12276923B2Exhaust system with U-shaped pipesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Apr 15, 2025·0 cites·20 claims
- 0782US11994809B2Exhaust system with u-shaped pipesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 28, 2024·0 cites·20 claims
- 0876US6042976AMethod of calibrating WEE exposure toolTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 28, 2000·51 cites·12 claims
- 0973US11681232B2Exhaust system with u-shaped pipesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 20, 2023·0 cites·20 claims
- 1070US10852649B2Methods and apparatus for removing contamination from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Dec 1, 2020·0 cites·20 claims
- 1165US11657492B2Reticle backside inspection methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 23, 2023·0 cites·20 claims
- 1262US10509334B2Methods and apparatus for removing contamination from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 17, 2019·0 cites·14 claims
- 1359US10983447B2Exhaust system with u-shaped pipesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 20, 2021·0 cites·20 claims
- 1457US10997706B2Reticle backside inspection methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 4, 2021·0 cites·20 claims
- 1543US2003183636A1Resealable plastic sealing containerFiled 2002·Application pending·0 cites
- 1633US2003197388A1Robot arm having wafer-scratching prevention functionTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 1731US6273935B1Apparatus and method for trapping a toxic gasTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Aug 14, 2001·5 cites·18 claims
- 1825US6820491B2Pressure differential measuring toolTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 23, 2004·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →