Inventor · disambiguated record
Shinichi Shima
Also filed as: SHIMA SHINICHI
10 granted patents·4 pending applications·104 citations·filing 1996–2025
88Inventor score
Files withCANON KK14
Top patents by PatentIndex Score
14 records- 0191US6822727B2Exposure apparatus, method of manufacturing semiconductor devices, semiconductor manufacturing plant, method of maintaining exposure apparatus, and position detectorCANON KK·Filed 2001·Granted Nov 23, 2004·42 cites·7 claims
- 0275US6693700B2Scanning projection exposure apparatusCANON KK·Filed 2001·Granted Feb 17, 2004·13 cites·5 claims
- 0372US2025362471A1Holding apparatus, apparatus for exposing substrate, measurement apparatus, method for manufacturing optical device, and method for manufacturing productCANON KK·Filed 2025·Application pending·0 cites
- 0467US6738128B2Exposure apparatusCANON KK·Filed 2003·Granted May 18, 2004·11 cites·12 claims
- 0567US6699628B2Aligning method for a scanning projection exposure apparatusCANON KK·Filed 2002·Granted Mar 2, 2004·8 cites·8 claims
- 0666US7924398B2Optical apparatus and method of manufacturing deviceCANON KK·Filed 2006·Granted Apr 12, 2011·2 cites·2 claims
- 0761US5971577ALight source device and illumination systemCANON KK·Filed 1996·Granted Oct 26, 1999·20 cites·14 claims
- 0852US7016012B2Exposure apparatusCANON KK·Filed 2003·Granted Mar 21, 2006·3 cites·10 claims
- 0951US7154581B2Scanning exposure apparatus, manufacturing method thereof, and device manufacturing methodCANON KK·Filed 2002·Granted Dec 26, 2006·3 cites·12 claims
- 1049US2008186462A1Immersion exposure apparatus and method of manufacturing deviceCANON KK·Filed 2008·Application pending·0 cites
- 1147US2009225290A1Exposure apparatus and device fabrication methodCANON KK·Filed 2009·Application pending·0 cites
- 1246US2009237633A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 1345US7570344B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Granted Aug 4, 2009·0 cites·2 claims
- 1433US6280062B1Light source device and illumination systemCANON KK·Filed 1999·Granted Aug 28, 2001·2 cites·7 claims
Join the waitlist — get patent alerts
Get an alert when Shinichi Shima files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →