Inventor · disambiguated record
Shunji Shinkawa
Also filed as: SHINKAWA SHUNJI
3 granted patents·3 citations·filing 2009–2022
54Inventor score
Top patents by PatentIndex Score
3 records- 0166US11749491B2Electron beam writing apparatus and cathode life span prediction methodNUFLARE TECHNOLOGY INC·Filed 2022·Granted Sep 5, 2023·0 cites·20 claims
- 0263US8008631B2Method of acquiring offset deflection amount for shaped beam and lithography apparatusNUFLARE TECHNOLOGY INC·Filed 2009·Granted Aug 30, 2011·1 cites·10 claims
- 0358US8507873B2Drift measuring method, charged particle beam writing method, and charged particle beam writing apparatusSHINKAWA SHUNJI·Filed 2010·Granted Aug 13, 2013·2 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →