Inventor · disambiguated record
Shigeru Shirayone
Also filed as: SHIRAYONE SHIGERU
14 granted patents·4 pending applications·293 citations·filing 1998–2022
89Inventor score
Top patents by PatentIndex Score
18 records- 0196US6503364B1Plasma processing apparatusHITACHI LTD·Filed 2000·Granted Jan 7, 2003·92 cites·7 claims
- 0296US6245190B1Plasma processing system and plasma processing methodHITACHI LTD·Filed 1998·Granted Jun 12, 2001·194 cites·10 claims
- 0395US12191121B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2022·Granted Jan 7, 2025·2 cites·4 claims
- 0495US11664233B2Method for releasing sample and plasma processing apparatus using sameHITACHI HIGH TECH CORP·Filed 2021·Granted May 30, 2023·2 cites·8 claims
- 0583US11257661B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Feb 22, 2022·3 cites·7 claims
- 0671US12112925B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2022·Granted Oct 8, 2024·0 cites·5 claims
- 0764US11107694B2Method for releasing sample and plasma processing apparatus using sameHITACHI HIGH TECH CORP·Filed 2019·Granted Aug 31, 2021·0 cites·1 claims
- 0863US11315792B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2019·Granted Apr 26, 2022·0 cites·6 claims
- 0960US10395935B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2018·Granted Aug 27, 2019·0 cites·3 claims
- 1055US10490412B2Method for releasing sample and plasma processing apparatus using sameHITACHI HIGH TECH CORP·Filed 2016·Granted Nov 26, 2019·0 cites·2 claims
- 1155US9941133B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2016·Granted Apr 10, 2018·0 cites·6 claims
- 1255US2009000741A1Vacuum prcessing apparatus and vacuum processing method of sampleARAMAKI TOORU·Filed 2008·Application pending·0 cites
- 1354US7947189B2Vacuum processing apparatus and vacuum processing method of sampleHITACHI HIGH TECH CORP·Filed 2007·Granted May 24, 2011·0 cites·8 claims
- 1452US11424108B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Aug 23, 2022·0 cites·4 claims
- 1549US2006237391A1Vacuum processing apparatus and vacuum processing method of sampleARAMAKI TOORU·Filed 2005·Application pending·0 cites
- 1644US2010193130A1Plasma processing apparatusKAWAKAMI MASATOSHI·Filed 2009·Application pending·0 cites
- 1741US9607874B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Mar 28, 2017·0 cites·4 claims
- 1839US2005072444A1Method for processing plasma processing apparatusFiled 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Shigeru Shirayone files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →