Inventor · disambiguated record
Shin Takano
Also filed as: TAKANO SHIN
3 granted patents·63 citations·filing 1999–2009
71Inventor score
Top patents by PatentIndex Score
3 records- 0174US6889014B2Exposure system, device production method, semiconductor production factory, and exposure apparatus maintenance methodCANON KK·Filed 2002·Granted May 3, 2005·18 cites·13 claims
- 0268US6580958B1Semiconductor manufacturing apparatus and device manufacturing methodCANON KK·Filed 1999·Granted Jun 17, 2003·43 cites·6 claims
- 0357US8319942B2Exposure apparatus and device fabrication methodTAKANO SHIN·Filed 2009·Granted Nov 27, 2012·2 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →