Inventor · disambiguated record
Shakul Tandon
Also filed as: TANDON SHAKUL
5 granted patents·4 pending applications·3 citations·filing 2015–2023
64Inventor score
Top patents by PatentIndex Score
9 records- 0173US10395883B2Aperture size modulation to enhance ebeam patterning resolutionINTEL CORP·Filed 2016·Granted Aug 27, 2019·3 cites·25 claims
- 0265US11581162B2Fill pattern to enhance ebeam process marginINTEL CORP·Filed 2021·Granted Feb 14, 2023·0 cites·7 claims
- 0355US12438102B2Hermetic barrier surrounding a plurality of diesINTEL CORP·Filed 2021·Granted Oct 7, 2025·0 cites·20 claims
- 0453US2023194997A1Increasing overlay margins for lines that span reticle boundaries in die-to-die reticle stitchingINTEL CORP·Filed 2021·Application pending·0 cites
- 0551US11107658B2Fill pattern to enhance e-beam process marginINTEL CORP·Filed 2016·Granted Aug 31, 2021·0 cites·20 claims
- 0650US2024321660A1Stitched guard rings with overlay error resiliencyINTEL CORP·Filed 2023·Application pending·0 cites
- 0748US2024004310A1One-dimensional overlay marksINTEL CORP·Filed 2022·Application pending·0 cites
- 0845US10338474B2Underlying absorbing or conducting layer for Ebeam direct write (EBDW) lithographyINTEL CORP·Filed 2015·Granted Jul 2, 2019·0 cites·25 claims
- 0942US2023205104A1Multiple targets on substrate layers for layer alignmentTANDON SHAKUL·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →