Inventor · disambiguated record
Shigeru Terashima
Also filed as: TERASHIMA SHIGERU
34 granted patents·3 pending applications·500 citations·filing 1989–2023
97Inventor score
Top patents by PatentIndex Score
37 records- 0195US6721031B2Exposure apparatusCANON KK·Filed 2002·Granted Apr 13, 2004·52 cites·41 claims
- 0288US6954255B2Exposure apparatusCANON KK·Filed 2002·Granted Oct 11, 2005·30 cites·19 claims
- 0387US6721032B2Exposure apparatus and control method therefor, and device manufacturing methodCANON KK·Filed 2002·Granted Apr 13, 2004·24 cites·25 claims
- 0486US8686378B2Charged particle beam drawing apparatus, and method of manufacturing articleTERASHIMA SHIGERU·Filed 2012·Granted Apr 1, 2014·7 cites·9 claims
- 0586US5157700AExposure apparatus for controlling intensity of exposure radiationCANON KK·Filed 1989·Granted Oct 20, 1992·41 cites·47 claims
- 0685US7123343B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Oct 17, 2006·6 cites·11 claims
- 0784US6225637B1Electron beam exposure apparatusCANON KK·Filed 1997·Granted May 1, 2001·43 cites·70 claims
- 0884US5995582AX-ray reduction exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1997·Granted Nov 30, 1999·56 cites·20 claims
- 0983US6054713AElectron beam exposure apparatusCANON KK·Filed 1998·Granted Apr 25, 2000·41 cites·10 claims
- 1082US11036149B2Imprint apparatus, method of operating the same, and method of manufacturing articleCANON KK·Filed 2018·Granted Jun 15, 2021·2 cites·33 claims
- 1179US7050152B2Exposure apparatusCANON KK·Filed 2004·Granted May 23, 2006·16 cites·18 claims
- 1279US6984362B2Processing apparatus, measuring apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted Jan 10, 2006·26 cites·5 claims
- 1377US8563950B2Energy beam drawing apparatus and method of manufacturing deviceNAKAYAMA TAKAHIRO·Filed 2012·Granted Oct 22, 2013·3 cites·10 claims
- 1477US7738076B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Jun 15, 2010·3 cites·5 claims
- 1574US11745410B2Imprint apparatus and method for manufacturing articleCANON KK·Filed 2019·Granted Sep 5, 2023·1 cites·10 claims
- 1674US6750946B2Processing apparatus for processing sample in predetermined atmosphereCANON KK·Filed 2001·Granted Jun 15, 2004·14 cites·14 claims
- 1774US6616898B2Processing apparatus with pressure control and gas recirculation systemCANON KK·Filed 1999·Granted Sep 9, 2003·36 cites·32 claims
- 1872US6463119B1Exposure method, exposure apparatus and semiconductor manufacturing apparatusCANON KK·Filed 2000·Granted Oct 8, 2002·15 cites·6 claims
- 1971US12097652B2Imprint apparatus and method for manufacturing articleCANON KK·Filed 2023·Granted Sep 24, 2024·0 cites·10 claims
- 2069US5600698AX-ray exposure apparatusCANON KK·Filed 1995·Granted Feb 4, 1997·28 cites·6 claims
- 2168US5131022AExposure method and apparatusCANON KK·Filed 1991·Granted Jul 14, 1992·20 cites·14 claims
- 2267US6934003B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2002·Granted Aug 23, 2005·6 cites·56 claims
- 2363US7212273B2Exposure apparatus and method of producing deviceCANON KK·Filed 2004·Granted May 1, 2007·6 cites·38 claims
- 2463US6453000B1Exposure method, exposure device and semiconductor device manufacturing methodCANON KK·Filed 2000·Granted Sep 17, 2002·8 cites·7 claims
- 2562US7566422B2Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatusCANON KK·Filed 2005·Granted Jul 28, 2009·3 cites·5 claims
- 2657US7027131B2Exposure apparatusCANON KK·Filed 2004·Granted Apr 11, 2006·4 cites·6 claims
- 2753US8980533B2Supply apparatus which supplies radicals, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2013·Granted Mar 17, 2015·0 cites·9 claims
- 2851US6603833B2X-ray exposure apparatusCANON KK·Filed 2001·Granted Aug 5, 2003·2 cites·20 claims
- 2951US6351512B1X-ray exposure apparatusCANON KK·Filed 2000·Granted Feb 26, 2002·2 cites·19 claims
- 3046US7724348B2Exposure apparatus and method, and device manufacturing methodCANON KK·Filed 2006·Granted May 25, 2010·0 cites·18 claims
- 3143US2004187786A1Processing apparatus for processing sample in predetermined atmosphereCANON KK·Filed 2004·Application pending·0 cites
- 3241US8665415B2Exposure apparatus and device manufacturing methodNAKAYAMA TAKAHIRO·Filed 2011·Granted Mar 4, 2014·0 cites·9 claims
- 3340US8004657B2Exposure apparatus, control method for the same, and device manufacturing methodCANON KK·Filed 2007·Granted Aug 23, 2011·0 cites·20 claims
- 3440US5790630ARadiation window and radiation system using the sameCANON KK·Filed 1996·Granted Aug 4, 1998·4 cites·7 claims
- 3539US2008304031A1Exposure apparatusCANON KK·Filed 2008·Application pending·0 cites
- 3639US2012183905A1Charged-particle beam drawing apparatus and article manufacturing methodTERASHIMA SHIGERU·Filed 2012·Application pending·0 cites
- 3732US6418187B1X-ray mask structure, and X-ray exposure method and apparatus using the sameCANON KK·Filed 1999·Granted Jul 9, 2002·1 cites·36 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →