Inventor · disambiguated record
Shinobu Tokushima
Also filed as: TOKUSHIMA SHINOBU
3 granted patents·1 pending application·38 citations·filing 2000–2002
71Inventor score
Files withNIKON CORP3
Top patents by PatentIndex Score
4 records- 0182US6499880B2Static pressure air bearingNIKON CORP·Filed 2001·Granted Dec 31, 2002·18 cites·15 claims
- 0268US6328473B1Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatusNIKON CORP·Filed 2000·Granted Dec 11, 2001·15 cites·19 claims
- 0355US6735867B2Method of making a static pressure air bearingNIKON CORP·Filed 2002·Granted May 18, 2004·5 cites·11 claims
- 0434US2002021428A1Charged-particle-beam microlithography stage including actuators for moving a reticle or substrate relative to the stage, and associated methodsFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →