Inventor · disambiguated record
Shinichi Tomita
Also filed as: TOMITA SHINICHI
19 granted patents·3 pending applications·111 citations·filing 1986–2016
93Inventor score
Top patents by PatentIndex Score
22 records- 0190US7755045B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 13, 2010·14 cites·15 claims
- 0290US7511271B2Scanning electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2005·Granted Mar 31, 2009·12 cites·16 claims
- 0382US8026491B2Charged particle beam apparatus and method for charged particle beam adjustmentHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 27, 2011·9 cites·5 claims
- 0479US7528049B2Method for manufacturing bonded SOI wafer and bonded SOI wafer manufactured therebySUMCO CORP·Filed 2007·Granted May 5, 2009·9 cites·24 claims
- 0575US7902039B2Method for manufacturing silicon waferSUMCO CORP·Filed 2007·Granted Mar 8, 2011·6 cites·6 claims
- 0673US7442992B2Bonded SOI substrate, and method for manufacturing the sameSUMCO CORP·Filed 2005·Granted Oct 28, 2008·8 cites·10 claims
- 0766US9287083B2Charged particle beam deviceTOMITA SHINICHI·Filed 2011·Granted Mar 15, 2016·3 cites·8 claims
- 0865US8097848B2Scanning electron microscopeHATANO MICHIO·Filed 2009·Granted Jan 17, 2012·2 cites·20 claims
- 0963US8143573B2Charged particle beam apparatusITO SUKEHIRO·Filed 2009·Granted Mar 27, 2012·1 cites·20 claims
- 1062US7781313B2Method for manufacturing silicon waferSUMCO CORP·Filed 2009·Granted Aug 24, 2010·2 cites·3 claims
- 1161US9053902B2Charged-particle radiation apparatusHITACHI HIGH TECH CORP·Filed 2012·Granted Jun 9, 2015·1 cites·18 claims
- 1258US2010090109A1Scanning electron microscopeHATANO MICHIO·Filed 2009·Application pending·0 cites
- 1347US6620285B2Method for bonding substratesSUMITOMO METAL IND·Filed 2001·Granted Sep 16, 2003·5 cites·7 claims
- 1446US7378332B2Laminated substrate, method of manufacturing the substrate, and wafer outer periphery pressing jigs used for the methodSUMITOMO MITSUBISHI SILICON·Filed 2003·Granted May 27, 2008·6 cites·9 claims
- 1545US7208058B2SOI substrate and manufacturing method thereofSUMITOMO MITSUBISHI SILICON·Filed 2004·Granted Apr 24, 2007·2 cites·2 claims
- 1644US10008361B2Charged particle beam device and installation methodHITACHI HIGH TECH CORP·Filed 2016·Granted Jun 26, 2018·0 cites·19 claims
- 1744US5170166ARange switching device for analog to digital conversionFUJIKURA LTD·Filed 1990·Granted Dec 8, 1992·11 cites·3 claims
- 1844US2009093106A1Bonded soi substrate, and method for manufacturing the sameSUMCO CORP·Filed 2008·Application pending·0 cites
- 1940US4725830AData input apparatusHITACHI LTD·Filed 1986·Granted Feb 16, 1988·13 cites·11 claims
- 2039US9058957B2Charged particle beam apparatusSHIGETO KUNJI·Filed 2012·Granted Jun 16, 2015·0 cites·8 claims
- 2136US2004137697A1Method and apparatus for separating composite substrateFiled 2003·Application pending·0 cites
- 2230US5246645AMethod of controlling injection moulding machineUBE INDUSTRIES·Filed 1992·Granted Sep 21, 1993·7 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →