Inventor · disambiguated record
Shih-Yu Tu
Also filed as: TU SHIH-YU
19 granted patents·5 pending applications·23 citations·filing 2004–2024
91Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD18UNIV NAT SUN YAT SEN2ACADEMIA SINICA1HUANG SHENG-LUNG1KUNG ANDREW H1
Top patents by PatentIndex Score
24 records- 0197US11693324B2System and method for detecting debris in a photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 4, 2023·3 cites·20 claims
- 0295US11528798B2Replacement method for droplet generatorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 13, 2022·2 cites·20 claims
- 0395US11520246B1Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 6, 2022·2 cites·19 claims
- 0493US11809083B2EUV photolithography system fuel source and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 7, 2023·2 cites·20 claims
- 0592US12085865B2System and method for detecting debris in a photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·1 cites·20 claims
- 0688US2025123576A1Systems for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0787US12210296B2Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·20 claims
- 0881US11953839B2Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 0977US11997778B2Replacement and refill method for droplet generatorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 28, 2024·0 cites·20 claims
- 1077US2024377764A1System and method for detecting debris in a photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1174US12235586B2EUV photolithography system fuel source and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 1268US12487534B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 2, 2025·0 cites·20 claims
- 1367US2025328089A1Radiation source apparatus and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1465US11032897B2Refill and replacement method for droplet generatorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 8, 2021·0 cites·20 claims
- 1565US7519262B2Fiber used in wideband amplified spontaneous emission light source and the method of making the sameUNIV NAT SUN YAT SEN·Filed 2007·Granted Apr 14, 2009·2 cites·8 claims
- 1664US8146389B2Fiber used in wideband amplified spontaneous emission light source and the method of making the sameHUANG SHENG-LUNG·Filed 2006·Granted Apr 3, 2012·3 cites·11 claims
- 1764US7298545B2High repetition rate visible optical parametric oscillatorACADEMIA SINICA·Filed 2005·Granted Nov 20, 2007·3 cites·25 claims
- 1862US11599030B2Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 7, 2023·0 cites·20 claims
- 1961US11067906B2Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 20, 2021·0 cites·20 claims
- 2061US7352949B2Fiber used in wideband amplified spontaneous emission light source and the method of making the sameUNIV NAT SUN YAT SEN·Filed 2004·Granted Apr 1, 2008·5 cites·6 claims
- 2157US11134558B2Droplet generator assembly and method for using the same and radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 28, 2021·0 cites·20 claims
- 2255US2025390027A1Lithographic apparatus and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2347US10156731B2Partial random laser illumination system and device having a random phase and amplitude componentUNIV NAT TAIWAN·Filed 2014·Granted Dec 18, 2018·0 cites·12 claims
- 2437US2007236779A1Laser display radiation source and methodKUNG ANDREW H·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →