Inventor · disambiguated record
Shao-Hua Wang
Also filed as: WANG SHAO-HUA
29 granted patents·10 pending applications·75 citations·filing 1992–2024
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD26WANG SHAO-HUA8TAIWAN SEMICONDUCTOR MFG2FUKUI PREC COMPONENT SHENZHEN1UNIV NAT TSING HUA1
Top patents by PatentIndex Score
39 records- 0196US11029613B2Droplet generator and method of servicing extreme ultraviolet radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 8, 2021·3 cites·20 claims
- 0295US11520246B1Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 6, 2022·2 cites·19 claims
- 0394US11803129B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 31, 2023·3 cites·20 claims
- 0494US10719020B2Droplet generator and method of servicing extreme ultraviolet radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 21, 2020·4 cites·20 claims
- 0590US12164235B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 0690US10670970B1Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 2, 2020·3 cites·20 claims
- 0788US2025123576A1Systems for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0887US12210296B2Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·20 claims
- 0985US12009177B2Detection using semiconductor detectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 11, 2024·1 cites·20 claims
- 1085US8008158B2Dopant implantation method using multi-step implantsTAIWAN SEMICONDUCTOR MFG·Filed 2008·Granted Aug 30, 2011·17 cites·16 claims
- 1181US11953839B2Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 1279US12360464B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 15, 2025·0 cites·20 claims
- 1377US2025053103A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1476US7761928B2Cap assembly structure with various accessoriesWANG SHAO-HUA·Filed 2007·Granted Jul 27, 2010·12 cites·5 claims
- 1575US11782350B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 10, 2023·0 cites·20 claims
- 1675US10779387B2Extreme ultraviolet photolithography system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 15, 2020·1 cites·20 claims
- 1774US2024290575A1Detection using semiconductor detectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1873USD343397SBicycle pumpWANG SHAO-HUA·Filed 1992·Granted Jan 18, 1994·16 cites·1 claims
- 1972US11644759B2Droplet generator and method of servicing extreme ultraviolet radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 9, 2023·0 cites·20 claims
- 2069US11520243B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 2166US7857742B2Hip training apparatusWANG SHAO-HUA·Filed 2008·Granted Dec 28, 2010·6 cites·7 claims
- 2265US11153958B2Extreme ultraviolet photolithography methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 19, 2021·0 cites·20 claims
- 2362US11086225B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 10, 2021·0 cites·20 claims
- 2461US9786470B2Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generatorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 10, 2017·0 cites·20 claims
- 2559US8152355B2Lamp-set structureWANG SHAO-HUA·Filed 2009·Granted Apr 10, 2012·2 cites·18 claims
- 2658US9606181B2Processing apparatus, ion implantation apparatus and ion implantation methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 28, 2017·0 cites·20 claims
- 2758US9267982B2Processing apparatus and ion implantation apparatusTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Feb 23, 2016·0 cites·20 claims
- 2857US11134558B2Droplet generator assembly and method for using the same and radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 28, 2021·0 cites·20 claims
- 2956US9357631B2Flexible printed circuit board and method for making sameFUKUI PREC COMPONENT SHENZHEN·Filed 2014·Granted May 31, 2016·0 cites·12 claims
- 3056USD616518SSwimming aid with webbed finger sheathsWANG SHAO-HUA·Filed 2008·Granted May 25, 2010·0 cites·1 claims
- 3155US2023393489A1Detection method of euv pellicle statusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 3253US2024045323A1Reticle covering pellicle for photolithogrphy scannerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 3352US2008242168A1Webbed finger sheaths for swimming aidWANG SHAO-HUA·Filed 2007·Application pending·0 cites
- 3448US6928319B2Acupuncture deviceFiled 2002·Granted Aug 9, 2005·4 cites·2 claims
- 3546US2005266745A1Finger web swimming aidWANG SHAO-HUA·Filed 2004·Application pending·0 cites
- 3646US2006276308A1Buttock shaping and training apparatusWANG SHAO-HUA·Filed 2005·Application pending·0 cites
- 3744US10121637B2Multi-platen ion implanter and method for implanting multiple substrates simultaneouslyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Nov 6, 2018·0 cites·10 claims
- 3838US2018169030A1Drug carrier and method of fabricating the sameUNIV NAT TSING HUA·Filed 2017·Application pending·0 cites
- 3935US2017110353A1Wafer boat, annealing tool and annealing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Shao-Hua Wang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →