Inventor · disambiguated record
Shinichiro Watahiki
Also filed as: WATAHIKI SHINICHIRO
4 granted patents·448 citations·filing 1996–1999
84Inventor score
Technology areasH10P
Files withKOKUSAI ELECTRIC CO LTD4
Top patents by PatentIndex Score
4 records- 0196US5788447ASubstrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Aug 4, 1998·246 cites·26 claims
- 0289US6066210ASubstrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure sectionKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted May 23, 2000·93 cites·14 claims
- 0388US6143083ASubstrate transferring mechanismKOKUSAI ELECTRIC CO LTD·Filed 1999·Granted Nov 7, 2000·81 cites·3 claims
- 0463US6190104B1Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment methodKOKUSAI ELECTRIC CO LTD·Filed 1999·Granted Feb 20, 2001·28 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →