Inventor · disambiguated record
Shao-Shuo Wu
Also filed as: WU SHAO-SHUO
1 granted patent·1 pending application·0 citations·filing 2022–2024
14Inventor score
Technology areasB08B
Files withTAIWAN SEMICONDUCTOR MFG CO LTD2
Top patents by PatentIndex Score
2 records- 0174US2024384402A1System and method for cleaning a pre-clean process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0270US12241157B2System and method for cleaning a pre-clean process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 4, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →