Inventor · disambiguated record
Shuyan Xu
Also filed as: XU SHUYAN
2 granted patents·1 pending application·1 citations·filing 2014–2015
30Inventor score
Files withUNIV NANYANG TECH3
Top patents by PatentIndex Score
3 records- 0146US9930766B2Apparatus and method for determining the type, density and temperature of neutral radicals in plasmaUNIV NANYANG TECH·Filed 2014·Granted Mar 27, 2018·1 cites·12 claims
- 0235US9837562B2Capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrateUNIV NANYANG TECH·Filed 2014·Granted Dec 5, 2017·0 cites·14 claims
- 0322US2015372160A1P-type dopant and method for p-type doping of a semiconductorUNIV NANYANG TECH·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →