Inventor · disambiguated record
Shuichi Yabu
Also filed as: YABU SHUICHI
14 granted patents·2 pending applications·473 citations·filing 1982–2007
94Inventor score
Files withCANON KK15
Top patents by PatentIndex Score
16 records- 0190US4786947AProjection exposure apparatusCANON KK·Filed 1987·Granted Nov 22, 1988·115 cites·8 claims
- 0289US6414742B1Stage apparatus, and exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1998·Granted Jul 2, 2002·70 cites·32 claims
- 0389US4907021AProjection exposure apparatusCANON KK·Filed 1989·Granted Mar 6, 1990·54 cites·6 claims
- 0486US4814625AExposure apparatus having gas supplying means for air blow offCANON KK·Filed 1988·Granted Mar 21, 1989·46 cites·3 claims
- 0584US7777762B2Image processing device and method for designCANON KK·Filed 2006·Granted Aug 17, 2010·14 cites·9 claims
- 0684US4998821AProjection apparatusCANON KK·Filed 1988·Granted Mar 12, 1991·39 cites·10 claims
- 0781US4506977ATransfer apparatus provided with an auto-focusing mechanismCANON KK·Filed 1983·Granted Mar 26, 1985·33 cites·15 claims
- 0875US6873397B2Exposure apparatus, gas replacing method, and method of manufacturing a semiconductor deviceCANON KK·Filed 2001·Granted Mar 29, 2005·14 cites·87 claims
- 0970US6157159AStage system and exposure apparatus using the sameCANON KK·Filed 1999·Granted Dec 5, 2000·28 cites·18 claims
- 1067US4869481APlate-like article holding deviceCANON KK·Filed 1988·Granted Sep 26, 1989·33 cites·3 claims
- 1153US4662753AApparatus and method for aligning objectsCANON KK·Filed 1985·Granted May 5, 1987·11 cites·6 claims
- 1252US6226072B1Stage system and exposure apparatus with the sameCANON KK·Filed 1998·Granted May 1, 2001·13 cites·10 claims
- 1346US2007184195A1Mask film formation method and mask film formation apparatusCANON KK·Filed 2007·Application pending·0 cites
- 1439US6947140B2Birefringence measurement apparatus and methodCANON KK·Filed 2003·Granted Sep 20, 2005·0 cites·10 claims
- 1534US4479711AMask alignerCANON KK·Filed 1982·Granted Oct 30, 1984·3 cites·4 claims
- 1634US2001006422A1Stage system in projection exposure apparatusFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →