Inventor · disambiguated record
Shu-Chih Yang
Also filed as: YANG SHU-CHIH
3 granted patents·2 pending applications·61 citations·filing 1996–2005
73Inventor score
Files withTAIWAN SEMICONDUCTOR MFG5
Top patents by PatentIndex Score
5 records- 0166US7008866B2Large-scale trimming for ultra-narrow gatesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Mar 7, 2006·11 cites·12 claims
- 0266US5837428AEtching method for extending i-line photolithography to 0.25 micron linewidthTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Nov 17, 1998·27 cites·14 claims
- 0352US6083815AMethod of gate etching with thin gate oxideTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jul 4, 2000·23 cites·20 claims
- 0444US2006205224A1Large-scale trimming for ultra-narrow gatesTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 0540US2005158666A1Lateral etch inhibited multiple etch method for etching material etchable with oxygen containing plasmaTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →