Inventor · disambiguated record
Shigeo Yawata
Also filed as: YAWATA SHIGEO
4 granted patents·71 citations·filing 1983–1996
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0160US5731637ASemiconductor deviceTOSHIBA KK·Filed 1996·Granted Mar 24, 1998·27 cites·4 claims
- 0249US5015593AMethod of manufacturing semiconductor deviceTOSHIBA KK·Filed 1990·Granted May 14, 1991·27 cites·7 claims
- 0337US4451303ADiffusion of aluminumTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted May 29, 1984·9 cites·6 claims
- 0431US5130261AMethod of rendering the impurity concentration of a semiconductor wafer uniformTOSHIBA KK·Filed 1990·Granted Jul 14, 1992·8 cites·10 claims
Join the waitlist — get patent alerts
Get an alert when Shigeo Yawata files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →