Inventor · disambiguated record
Shigenobu Yokoshima
Also filed as: YOKOSHIMA SHIGENOBU
3 granted patents·1 pending application·102 citations·filing 2000–2004
75Inventor score
Files withCANON KK4
Top patents by PatentIndex Score
4 records- 0189US6652709B1Plasma processing apparatus having circular waveguide, and plasma processing methodCANON KK·Filed 2000·Granted Nov 25, 2003·62 cites·1 claims
- 0283US6870123B2Microwave applicator, plasma processing apparatus having same, and plasma processing methodCANON KK·Filed 2001·Granted Mar 22, 2005·23 cites·23 claims
- 0370US6417080B1Method of processing residue of ion implanted photoresist, and method of producing semiconductor deviceCANON KK·Filed 2000·Granted Jul 9, 2002·17 cites·48 claims
- 0437US2005029954A1Plasma processing apparatus and methodCANON KK·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →