Inventor · disambiguated record
Sheng-Kang Yu
Also filed as: YU SHENG · YU SHENG-KANG
54 granted patents·20 pending applications·52 citations·filing 2016–2025
97Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD70UNIV GEORGE MASON2CHEN YU-CHIH1CNPC CHUANQING DRILLING ENG CO1
Top patents by PatentIndex Score
74 records- 0197US12007694B2Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 11, 2024·4 cites·20 claims
- 0297US11693326B1System and method for dynamically controlling temperature of thermostatic reticlesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 4, 2023·7 cites·20 claims
- 0396US12019378B2Methods of cleaning a lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 25, 2024·2 cites·20 claims
- 0496US11380566B2System for a semiconductor fabrication facility and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 5, 2022·3 cites·20 claims
- 0595US12061423B2Method and apparatus for mitigating tin debrisTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 13, 2024·2 cites·20 claims
- 0694US11553581B2Radiation source apparatus and method for using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 10, 2023·2 cites·20 claims
- 0794US10875060B2Method and apparatus for removing debris from collectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·8 cites·20 claims
- 0892US12078933B2System and method for omnidirectional real time detection of photolithography characteristicsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 3, 2024·2 cites·20 claims
- 0992US2025362594A1Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1091US10156794B1Positioning device for aligning semiconductor tool and overhead hoist transport systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 18, 2018·7 cites·20 claims
- 1189US11841625B2Device and method to remove debris from an extreme ultraviolet (EUV) lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 12, 2023·1 cites·20 claims
- 1288US12372887B2Methods of cleaning a lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jul 29, 2025·0 cites·20 claims
- 1388US11822259B2Acoustic particle deflection in lithography toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 21, 2023·1 cites·20 claims
- 1487US12066761B2Inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 20, 2024·1 cites·20 claims
- 1587US11605477B1EUV lithography apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 14, 2023·1 cites·20 claims
- 1686US2025110414A1Reticle cleaning device and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1785US11647578B2Lithography thermal controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 9, 2023·1 cites·20 claims
- 1884US12405529B2Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 2, 2025·0 cites·20 claims
- 1984US12210295B2Reticle cleaning device and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 28, 2025·0 cites·19 claims
- 2084US10859928B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 8, 2020·2 cites·20 claims
- 2184US2025348005A1Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2284US2025321492A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2383US2025321499A1Inspection system for extreme ultraviolet (euv) light sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2482US12422755B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 23, 2025·0 cites·20 claims
- 2582US10955752B2EUV radiation source apparatus for lithographyCHEN YU CHIH·Filed 2019·Granted Mar 23, 2021·3 cites·20 claims
- 2682US2025321505A1Acoustic particle deflection in lithography toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2781US12449734B2Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 2881US12235593B2System and method for dynamically controlling temperature of thermostatic reticlesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 2981US12228863B2EUV light source contamination monitoring systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 18, 2025·0 cites·20 claims
- 3081US2025362621A1Semiconductor processing tool and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 3181US2024361701A1Novel design of an inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3280US12216413B2Device and method to remove debris from an extreme ultraviolet (EUV) lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 4, 2025·0 cites·20 claims
- 3380US10627728B2Method for creating vacuum in load lock chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 21, 2020·3 cites·18 claims
- 3480US2025321495A1Radiation collectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 3579US12119129B2EUV lithography apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
- 3679US11854846B2System for a semiconductor fabrication facility and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
- 3779US11650512B2Reticle cleaning device and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 16, 2023·0 cites·20 claims
- 3879US2025147439A1Cleaning apparatus, extreme ultraviolet lithography system, and method of cleaning extreme ultraviolet lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3978US12372886B2Acoustic particle deflection in lithography toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
- 4078US12189298B2EUV vessel perimeter flow auto adjustmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 4178US12096544B2Lithography thermal controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 4278US2025291263A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 4378US2025076770A1New design of euv vessel perimeter flow auto adjustmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4477US2025164900A1System and method for dynamically controlling temperature of thermostatic reticlesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 4577US2024379259A1Euv lithography apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4676US12510827B2EUV radiation source apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 30, 2025·0 cites·20 claims
- 4776US2025155828A1Euv light source contamination monitoring systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 4876US2024389215A1Lithography thermal controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4975US11513441B2EUV radiation source apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 29, 2022·0 cites·20 claims
- 5074US12372878B2Inspection system for extreme ultraviolet (EUV) light sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
Showing the top 50 of 74 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →