Inventor · disambiguated record
Shengnan Yu
Also filed as: YU SHENGNAN
3 granted patents·3 pending applications·1 citations·filing 2020–2025
47Inventor score
Technology areasH10P
Files withHITACHI HIGH TECH CORP6
Top patents by PatentIndex Score
6 records- 0176US11776792B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2020·Granted Oct 3, 2023·1 cites·4 claims
- 0258US2025149313A1Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2025·Application pending·0 cites
- 0357US12211674B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2021·Granted Jan 28, 2025·0 cites·9 claims
- 0451US2025132188A1Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 0549US2024290581A1Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 0636US12014908B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2020·Granted Jun 18, 2024·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →