Inventor · disambiguated record
Shing Shen Yu
Also filed as: YU SHING-SHEN
1 granted patent·1 pending application·11 citations·filing 2004–2005
33Inventor score
Technology areasG03F
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0168US7501226B2Immersion lithography system with wafer sealing mechanismsTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Mar 10, 2009·11 cites·22 claims
- 0236US2006222975A1Integrated optical metrology and lithographic process track for dynamic critical dimension controlTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →