Inventor · disambiguated record
Shifang Zhou
Also filed as: ZHOU SHIFANG
7 granted patents·2 pending applications·85 citations·filing 2006–2012
82Inventor score
Top patents by PatentIndex Score
9 records- 0191US7649432B2Three-dimensional microstructures having an embedded and mechanically locked support member and method of formation thereofNUVOTORNICS LLC·Filed 2007·Granted Jan 19, 2010·55 cites·16 claims
- 0285US9187313B2Anodically bonded strain isolatorESKRIDGE MARK·Filed 2012·Granted Nov 17, 2015·7 cites·18 claims
- 0384US7690254B2Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrateHONEYWELL INT INC·Filed 2007·Granted Apr 6, 2010·18 cites·11 claims
- 0465US7487678B2Z offset MEMS devices and methodsHONEYWELL INT INC·Filed 2006·Granted Feb 10, 2009·2 cites·10 claims
- 0559US7830003B2Mechanical isolation for MEMS devicesHONEYWELL INT INC·Filed 2007·Granted Nov 9, 2010·2 cites·4 claims
- 0654US8418555B2Bidirectional, out-of-plane, comb drive accelerometerFOSTER MICHAEL·Filed 2009·Granted Apr 16, 2013·1 cites·14 claims
- 0751US8404568B2Systems and methods for fabricating an out-of-plane MEMS structureFOSTER MICHAEL·Filed 2008·Granted Mar 26, 2013·0 cites·12 claims
- 0846US2008199656A1Three-dimensional microstructures and methods of formation thereofROHM & HAAS ELECT MAT·Filed 2007·Application pending·0 cites
- 0943US2009001499A1Thick active layer for mems device using wafer dissolve processHONEYWELL INT INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →