Inventor · disambiguated record
Sidlgata V. Sreenivasan
Also filed as: SREENIVASAN SIDLGATA V
143 granted patents·70 pending applications·5,135 citations·filing 2000–2025
99Inventor score
Top patents by PatentIndex Score
213 records- 0199US7077992B2Step and repeat imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2002·Granted Jul 18, 2006·302 cites·71 claims
- 0299US6916584B2Alignment methods for imprint lithographyMOLECULAR IMPRINTS INC·Filed 2002·Granted Jul 12, 2005·227 cites·49 claims
- 0399US6873087B1High precision orientation alignment and gap control stages for imprint lithography processesUNIV TEXAS·Filed 2000·Granted Mar 29, 2005·349 cites·27 claims
- 0498US8066930B2Forming a layer on a substrateSREENIVASAN SIDLGATA V·Filed 2010·Granted Nov 29, 2011·58 cites·20 claims
- 0598US7691313B2Method for expelling gas positioned between a substrate and a moldMOLECULAR IMPRINTS INC·Filed 2006·Granted Apr 6, 2010·44 cites·16 claims
- 0698US7229273B2Imprint lithography template having a feature size under 250 nmUNIV TEXAS·Filed 2004·Granted Jun 12, 2007·80 cites·10 claims
- 0798US7170589B2Apparatus to vary dimensions of a substrate during nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Jan 30, 2007·45 cites·27 claims
- 0898US7140861B2Compliant hard template for UV imprintingMOLECULAR IMPRINTS INC·Filed 2004·Granted Nov 28, 2006·132 cites·32 claims
- 0998US7070405B2Alignment systems for imprint lithographyMOLECULAR IMPRINTS INC·Filed 2002·Granted Jul 4, 2006·214 cites·45 claims
- 1098US6921615B2High-resolution overlay alignment methods for imprint lithographyUNIV TEXAS·Filed 2001·Granted Jul 26, 2005·161 cites·26 claims
- 1198US6916585B2Method of varying template dimensions to achieve alignment during imprint lithographyUNIV TEXAS·Filed 2003·Granted Jul 12, 2005·108 cites·30 claims
- 1298US6900881B2Step and repeat imprint lithography systemsMOLECULAR IMPRINTS INC·Filed 2002·Granted May 31, 2005·310 cites·84 claims
- 1398US6842229B2Imprint lithography template comprising alignment marksUNIV TEXAS·Filed 2003·Granted Jan 11, 2005·132 cites·19 claims
- 1497US8349241B2Method to arrange features on a substrate to replicate features having minimal dimensional variabilityMOLECULAR IMPRINTS INC·Filed 2002·Granted Jan 8, 2013·87 cites·14 claims
- 1597US7396475B2Method of forming stepped structures employing imprint lithographyMOLECULAR IMPRINTS INC·Filed 2003·Granted Jul 8, 2008·159 cites·25 claims
- 1697US7098572B2Apparatus to control displacement of a body spaced-apart from a surfaceUNIV TEXAS·Filed 2004·Granted Aug 29, 2006·101 cites·28 claims
- 1797US7019819B2Chucking system for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2002·Granted Mar 28, 2006·73 cites·24 claims
- 1897US6986975B2Method of aligning a template with a substrate employing moire patternsUNIV TEXAS·Filed 2004·Granted Jan 17, 2006·73 cites·23 claims
- 1997US6908861B2Method for imprint lithography using an electric fieldMOLECULAR IMPRINTS INC·Filed 2002·Granted Jun 21, 2005·203 cites·20 claims
- 2096US9987653B2Versatile process for precision nanoscale manufacturingUNIV TEXAS·Filed 2016·Granted Jun 5, 2018·26 cites·42 claims
- 2196US9415418B2Programmable deposition of thin films of a user-defined profile with nanometer scale accuracyUNIV TEXAS·Filed 2014·Granted Aug 16, 2016·38 cites·36 claims
- 2296US7635445B2Method of separating a mold from a solidified layer disposed on a substrateMOLECULAR IMPRINTS INC·Filed 2005·Granted Dec 22, 2009·33 cites·15 claims
- 2396US7298456B2System for varying dimensions of a substrate during nanoscale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Nov 20, 2007·45 cites·18 claims
- 2496US7279113B2Method of forming a compliant template for UV imprintingMOLECULAR IMPRINTS INC·Filed 2005·Granted Oct 9, 2007·29 cites·12 claims
- 2596US7224443B2Imprint lithography substrate processing tool for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2006·Granted May 29, 2007·26 cites·22 claims
- 2696US7179396B2Positive tone bi-layer imprint lithography methodMOLECULAR IMPRINTS INC·Filed 2003·Granted Feb 20, 2007·115 cites·26 claims
- 2795US9718096B2Programmable deposition of thin films of a user-defined profile with nanometer scale accuracyUNIV TEXAS·Filed 2016·Granted Aug 1, 2017·27 cites·42 claims
- 2895US8808808B2Method for imprint lithography utilizing an adhesion primer layerXU FRANK Y·Filed 2007·Granted Aug 19, 2014·20 cites·20 claims
- 2995US7780893B2Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marksMOLECULAR IMPRINTS INC·Filed 2007·Granted Aug 24, 2010·39 cites·18 claims
- 3095US7670529B2Method and system for double-sided patterning of substratesMOLECULAR IMPRINTS INC·Filed 2006·Granted Mar 2, 2010·34 cites·6 claims
- 3195US7420654B2Method of varying dimensions of a substrate during nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Sep 2, 2008·34 cites·17 claims
- 3295US7179079B2Conforming template for patterning liquids disposed on substratesMOLECULAR IMPRINTS INC·Filed 2003·Granted Feb 20, 2007·52 cites·8 claims
- 3395US7136150B2Imprint lithography template having opaque alignment marksMOLECULAR IMPRINTS INC·Filed 2003·Granted Nov 14, 2006·66 cites·20 claims
- 3495US6980282B2Method for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2002·Granted Dec 27, 2005·73 cites·24 claims
- 3595US6964793B2Method for fabricating nanoscale patterns in light curable compositions using an electric fieldUNIV TEXAS·Filed 2002·Granted Nov 15, 2005·88 cites·17 claims
- 3694US11881435B2Catalyst influenced chemical etching for fabricating three-dimensional SRAM architecturesUNIV TEXAS·Filed 2022·Granted Jan 23, 2024·2 cites·5 claims
- 3794US8850980B2Tessellated patterns in imprint lithographySREENIVASAN SIDLGATA V·Filed 2007·Granted Oct 7, 2014·23 cites·7 claims
- 3894US8387482B2Method and system to control movement of a body for nano-scale manufacturingCHOI BYUNG-JIN·Filed 2010·Granted Mar 5, 2013·14 cites·7 claims
- 3994US8033814B2Device for holding a template for use in imprint lithographyUNIV TEXAS·Filed 2010·Granted Oct 11, 2011·10 cites·18 claims
- 4094US7727453B2Step and repeat imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2005·Granted Jun 1, 2010·22 cites·23 claims
- 4194US7303383B1Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marksUNIV TEXAS·Filed 2004·Granted Dec 4, 2007·29 cites·26 claims
- 4294US7245358B2Substrate support systemUNIV TEXAS·Filed 2005·Granted Jul 17, 2007·24 cites·24 claims
- 4394US6982783B2Chucking system for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2004·Granted Jan 3, 2006·37 cites·20 claims
- 4494US6926929B2System and method for dispensing liquidsMOLECULAR IMPRINTS INC·Filed 2002·Granted Aug 9, 2005·42 cites·20 claims
- 4594US6922906B2Apparatus to orientate a body with respect to a surfaceUNIV TEXAS·Filed 2004·Granted Aug 2, 2005·60 cites·27 claims
- 4693US10026609B2Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structuresUNIV TEXAS·Filed 2015·Granted Jul 17, 2018·46 cites·30 claims
- 4793US8109753B2Double-sided nano-imprint lithography systemCHOI BYUNG-JIN·Filed 2010·Granted Feb 7, 2012·14 cites·18 claims
- 4893US7432634B2Remote center compliant flexure deviceUNIV TEXAS·Filed 2005·Granted Oct 7, 2008·14 cites·17 claims
- 4993US7307697B2Adaptive shape substrate support systemUNIV TEXAS·Filed 2005·Granted Dec 11, 2007·25 cites·5 claims
- 5092US8394282B2Adaptive nanotopography sculptingPANGA AVINASH·Filed 2009·Granted Mar 12, 2013·36 cites·20 claims
Showing the top 50 of 213 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →