Inventor · disambiguated record
Soon Cheon Cho
Also filed as: CHO SOON-CHEON
5 granted patents·8 pending applications·12 citations·filing 2003–2024
68Inventor score
Top patents by PatentIndex Score
13 records- 0176US10981184B2Coating apparatus and coating methodSEMES CO LTD·Filed 2018·Granted Apr 20, 2021·1 cites·12 claims
- 0265US6843587B2Surface light source apparatus, and method and apparatus for manufacturing the sameLS TECH CO LTD·Filed 2003·Granted Jan 18, 2005·11 cites·7 claims
- 0360US2025140533A1Substrate support device and method of controlling prevention of leakage of temperature control fluidSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0459US2025218723A1Substrate support device and method of preventing occurrence of arcingSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0555US12417897B2Plasma processing apparatus and plasma processing method using the sameSEMES CO LTD·Filed 2022·Granted Sep 16, 2025·0 cites·13 claims
- 0655US2025191892A1Substrate processing method, processing module, and semiconductor manufacturing equipment including the sameSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0753US2023166285A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0850US2023120716A1Apparatus for treating substrate and method for operating thereofSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0949US2022285139A1Apparatus for treating substrate and substrate treating methodSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1049US2023343563A1Substrate treating apparatusSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1140US11967491B2Method and apparatus for parts cleaningSEMES CO LTD·Filed 2021·Granted Apr 23, 2024·0 cites·7 claims
- 1238US2005036320A1Surface light source apparatus, and method and apparatus for manufacturing the sameLS TECH CO LTD·Filed 2004·Application pending·0 cites
- 1337US10622226B2Method and apparatus for cleaning component of substrate processing apparatusSEMES CO LTD·Filed 2017·Granted Apr 14, 2020·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →